Electron Microscope Analyzers

TEM的Quontax Eds

Energy Dispersive X-ray Spectrometer for STEM, TEM and T-SEM

纳米级元素映射

定量元素映射

TEM的Quontax Eds

强调

> 15
TEM中有硅漂移探测器的经验
探测器材料和驱动电必威手机客户端子设备的设计用于快速,精确和可靠的数据获取,即使在原子分辨率下也不会干扰高端TEM性能。
80
凯夫
元素ID和量化的前所未有的上能极限
With TEM-specific high energy electrons and thus higher energy element lines for quantitative EDS
1
原子
单原子ID和原子列映射
使用高固体角度Xflash 6T检测器与高端高亮度冷FEG像差校正茎的高固体角度在几秒钟内识别单原子识别

在纳米尺度上的TEM,STEM和SEM(T-SEM)中的EDS元素映射

The clear versatile measurement setup and slimline geometry ensure fast reliable TEM EDS data on a routine basis. Hyperspectral images are acquired using so-called HyperMaps or Spectrum Images. Spectra per pixel and all meta-data needed for correct quantitative analysis are saved for inspection and processing.

  • 每种显微镜杆件类型的细长线设计和几何优化可确保最大收集和起飞角。
  • Helps avoid specimen tilt, absorption, shadowing and system peaks.
  • Windowless detectors for further increase of detection efficiency, particularly in the low energy region for K-lines of light elements and L-, M- and further lines of higher Z-elements.
  • 默认情况下自动撤离和自定义可确保长期检测器寿命和多功能实验。
  • Automatic monitoring of in-situ and in-operando experiments, such as heating of materials, where chemical changes are recorded in real time
  • 综合的软件套件eSprit用于数据分析在线和离线。

Benefits

用于上线和离线TEM EDS的软件

TEM的Quontax Edsincludes a flexible and transparent analysis software packageEsprit。默认和可调方法允许快速,全面的数据挖掘元素映射,所谓的超图或频谱图像以及生成定量元素图。包括基于标准的和无标准的光谱,对象,线扫描和元素映射的量化例程,以及基于PCA的相位分析和自动统计部分分析。

  • 带有个人硬件键和/或LAN选项的离线分析软件,用于学生或实验室网络。
  • 打开透明的用户界面:您看到的就是您得到的。
  • 清晰的设置,修改和保存/重新加载EDS数据的量化例程。
  • Two quantification methods for electron transparent specimens: Cliff-Lorimer- and Zeta-Factor-Method.
  • 可以计算出任何电压的理论悬崖长因子,包括SEM上的低电压(SEM中的TEM),使用大型稳定更新的原子数据库。
  • 使用标准标本对实验悬崖 - 莱顿和Zeta因子的易于软件引导的校准。
  • 所有元素的zeta因子只能使用现有的悬崖 - 莱iter因子从几个元素标准来计算。
  • 背景模型的选择:电子透明和批量标本的物理模型,以及数学背景计算。
  • 用不同的模板报告生成。

申请

Fields of Application of Elemental Analysis on TEM

半导体
Deconvolution results at low X-ray energy of a spectrum obtained from a NiSi(Pt)

NISI(PT)-NISI2半导体结构中PT浓度的定量

This application example shows EDS data from the epitaxial growth of a Pt alloyed NiSi thin film and the quantification of a few at% of Pt alloyed in NiSi. NiSi is used for nm-sized metallization structures in semiconductor devices like MOSFETs.
分层系统的组合元素地图

分层结构的化学相分析

It can be advantageous to check hyperspectral images for the existence of chemical phases without applying prior knowledge. Bruker’s ESPRIT AutoPhase automatically finds specimen regions of similar composition by analyzing a HyperMap based on Principle Component Analysis of the spectra. The sensitivity of this procedure can be adjusted. The approach is demonstrated using a multi-layer structure in cross-section as an example.
纳米线的混合元素图

Chemical Characterization of Nanowires

纳米结构,例如纳米线和纳米棒和功能化的纳米棒,对于纳米技术中的各种应用,纳米电子或药物在人体中的递送都越来越引起人们的兴趣。
Single silicon atom in graphene

在石墨烯上识别单个原子

获得单个原子的光谱不仅是ED的最高艺术,而且还可以提供有关特定元素激发属性的有价值的新信息。
互连结构的高角度环形黑场图像

Chemical Composition of Semiconductor Interconnects

Standard energy dispersive X-ray spectroscopy (EDS or EDX) using detector areas of 30mm2 on conventional scanning transmission electron microscopes (STEM) can deliver element mappings with nm resolution within a few minutes. The condition is, that the detector head is small enough (in slim-line design) to get as close to the specimen for (high solid angle) and as high above the specimen (for high take-off angle) as possible. The latter helps to avoid shadowing and absorption effects.
RAM Microchip元素分布图

使用SEM(T-SEM)中的茎 - 半导体RAM微芯片的高分辨率映射(T-SEM)

具有基于X射线的方法的半导体纳米结构的元素分布映射并不总是直接的。在研究半导体材料时,纳米级空间分辨率和X射线峰重叠的需求是常见的挑战。必威手机客户端有时,使用SEM代替昂贵的TEM工具和表征时间是有益的。