ContourGT-X
强调
ContourGT-X
The ContourGT-X 3D Optical Profiler provides the highest performing non-contact surface measurements for laboratory research and production process control. Incorporating ten generations of white light interferometry (WLI) innovation and design, this metrology system delivers the highest vertical resolution over the industry’s largest field of view. Key features include full automation and a production interface, a large motorized XYZ stage, tip/tilt in the head, and an integral air isolation table. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, the ContourGT-X offers the ultimate in gage-capable 3D optical accuracy and robustness.
Features
Production-Ready Design and Reliability
ContourGT-X结合力量的专利/直到t head, a patented self-calibrating laser reference, integrated pattern recognition, and a host of other proprietary interferometry innovations to deliver extremely accurate surface metrology with high throughput. The system’s automation-ready configuration enables rapid optimization in almost any production environment with features ranging from an air table stabilizer kit for enhanced X, Y, Z wafer placement accuracy and PDU, EMO, and vacuum systems for integration to modified vacuum chucks for autoloader end-effector compatibility.
最高分辨率成像的高准确阶段
Contourgt-X电动XY阶段在X和Y方向上提供了12英寸编码的运动。该阶段支持自动例程，例如多点数据收集，以及用于大区域分析的缝合能力。0.5微米编码器提供可靠的，可重复的自动化和样品定位。通过直观的操纵杆和软件接口控件使操作员易于使用样品定位。
直观的表面测量和分析软件
Bruker的Vision64®操作和分析软件提供了行业功能最强和简化的图形用户界面，将智能体系结构与直观的视觉工作流以及广泛的用户定义的自动化功能相结合，以快速，全面的数据收集和分析。先进的生产接口允许将Contourgt-X适应几乎任何生产环境和自动化过程。该界面提供了自定义过程工作流程，自动映射和加载测量配方的工具。
