Semiconductor Solutions

Cryo Dry Cleaning

Cryogenic CO₂ Cleaning

Extremely fast and environmentally friendly, Bruker's dry cryogenic CO2cleaning technology offers unique advantages over conventional cleaning techniques. The Bruker technology is cost effective, non-destructive, waste and residue free, and eliminates corrosion and staining. With over 100 tools installed, Bruker provides Cryogenic CO2process equipment for a broad range of applications across most semiconductor market segments.


Our customers benefit from many inherent aspects of the technology and the perfected, patented features of Bruker's equipment. Our cryo dry cleaning systems deliver on a low cost of ownership with:

  • Superior cleaning performance using our patented nozzle design
  • Proven 24/7 production performance for high-demand applications
  • High throughputs ensuring high capital utilization
  • Compact system design requiring minimal cleanroom space
  • 标准湿或血浆清洁过程未见的产量提高

Bruker's Commitment

As the leading innovator of dry CO2technology, Bruker sets the standard for quality dry process cleaning. The company currently holds over 25 U.S. and International patents in many areas of cryogenic CO2cleaning. This innovation has been the standard in production cryogenic CO2清洁超过30年。

Our state of the art applications lab in Delray Beach, FL provides a location where our global customer base can come to develop new cleaning techniques or optimize their existing processes.

To learn more about how Cryogenic CO2清洁技术可以解决您最困难的污染问题,请联系我们for more information or schedule a demonstration.



Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.

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