尺寸边缘PSS
强调
尺寸边缘PSS
力量的维度边缘™PSS原子力Microscope with AutoMET™ Metrology Software is the ideal nano-metrology and nano-inspection system for LED substrate and epitaxial manufacturers. As an extension of the Dimension Edge AFM platform, the Edge PSS incorporates the incredible value and resolution for which the Dimension AFM systems are renowned, while also providing a production-based solution for substrate measurements.
Eigenschaften
The Highest Resolution for PSS Analysis
随着图案蓝宝石底物（PSS）的音高低于2微米，传统的共聚焦技术将失去提供宝贵的过程计量学所需的分辨率。尺寸边缘PSS原子力显微镜（AFM）通过子纳米分辨率解决这一需求，并且能够一次测量9个2英寸晶片（或单个4或6英寸晶片），提供所有数据保持PSS制造过程的控制所必需。
In addition to the specific PSS measurement capabilities built into the Dimension Edge PSS, the system also incorporates all of the world-leading Bruker AFM technology that the Dimension microscopes have become famous for, including high resolution and low noise for epitaxial roughness measurements, and such standard and proprietary AFM modes as TappingMode, Contact Mode, PhaseImaging™ and LiftMode™.
Advanced PSS Metrology Capabilities
- Height, width & pitch
- Side wall angle & feature profile
- Asymmetry identification & measurement
- Contamination identification
- Turn identification & turn angle
- 平坦的顶部标识
行业领先的自动软件
Edge PSS合并了专门设计以满足LED制造要求的自动软件。该软件具有两种不同的操作模式：
- Operator Level – A simple user interface with push button guides users through the steps of tip change, align, tune and qualify. Single button operation runs up to 9 wafers automatically with simple PASS/FAIL output.
- 工程师级别 - 密码保护的用户界面允许工程师访问所有关键的AFM参数。过程工程师还可以在此模式下轻松设置所有必要的通过/失败标准。
