Cryogenic Wafer Cleaning

WC-2200

Non-Aqueos CO₂ Cryogenic Dry Cleaning

从侵略性到温柔

Environmentally Safe

Highlights

低温干涂料晶片清洁系统

The Bruker Wafer Clean 2200 System removes particulate contamination and thin film organic residues from silicon, compound semiconductor, MEMS and thin film head substrates using a unique carbon dioxide (CO2)清洁过程。co2雪清洗速度快,环保d non-damaging. The all-dry process offers numerous advantages over conventional wet and plasma cleaning techniques. This fully automated, high volume production system is field proven with over 100 systems running 24/7 in high volume production applications around the globe.

25 WPH
栅格扫描运动
全球和地方清洁
Yield Improvement
Cleaning Efficiency down to 120nm
IBE Veil and Fence removal
Environmentally Safe
溶剂免费
ZERO Hazardous Waste

安温登根

Support

Support

我们能帮你什么吗?

布鲁克partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

我们训练有素的支持工程师,应用程序科学家和主题专家团队全力致力于通过系统服务和升级以及应用程序支持和培训来最大化您的生产率。betway手机客户端下载

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