Stylus Profilometer

DektakXT

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DektakXT

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DektakXT

The DektakXT® stylus profilometer features a revolutionary benchtop design that enables an unmatched repeatability of 4Å and up to 40% improvement in scanning speeds. This major milestone in stylus profiler performance is the culmination of over fifty years of Dektak® innovation and industry leadership. Through its combination of industry firsts, DektakXT delivers the ultimate in performance, ease of use, and value to enable better process monitoring from R&D to QC. The technological breakthroughs incorporated in DektakXT enable critical nanometer-level surface measurements for the microelectronics, semiconductor, solar, high-brightness LED, medical, and materials science industries.

4 Angstrom
repeatability
Delivers industry-leading accuracy.
Single-arch
设计
Provides breakthrough scan stability.
Self-aligning
styli
启用轻松的小费交换。

특징

Features

Accelerating Data Collection and Analysis

Dektakxt利用独特的直接驱动扫描阶段,在保持行业领先的性能的同时,将测量扫描时间加速了40%。Vision64,Bruker的64位并行处理操作和分析软件,可以更快地加载3D文件以及更快的过滤器和Multiscan数据库分析的应用程序。

Dektakxt的64位并行处理Vision54在几乎一半的时间内完成并处理大型3D数据文件。

提供最重复的测量

Dektak's all-in-one stylus sensor enables simultaneous large vertical range and low-force scanning.

Implementing a single-arch structure makes the DektakXT sturdier, which minimizes the effects of environmental noise. DektakXT’s upgraded “smart electronics” reduce temperature variations and employ modern processors that minimize error-inducing noise, allowing it to be an even more robust system capable of measuring <10nm step heights.

完善操作和分析

布鲁克’s Vision64 software complements DektakXT’s innovative design by providing the most intuitive and streamlined visual user interface. The combination of intelligent architecture and customizable automation capabilities allow for fast and comprehensive data collection and analysis. Whether you’re using a recipe to perform routine analysis on single scans, or applying custom filters settings and calculations, DektakXT’s Data Analyzer displays current data while also revealing other possible analyses.

DektakXT's Vision64 significantly simplifies and accelerates operation and data analysis.

Making Things Easy

DektakXT features the fastest and easiest tip exchange, enabling various tips to address the widest range of applications.

The DektakXT’s self-aligning stylus assembly allows the user to quickly and easily change stylus size while eliminating any potential mishaps during the process. Bruker offers the widest range of stylus sizes to accommodate nearly any application need.

Ensuring High Yield

DektakXT provides the ability to quickly and easily set up and run automated multi-site measurement routines to verify the precise thickness of thin films across the wafer surface with unmatched repeatability. This efficient monitoring can save valuable time and money by improving yields.

DektakXT 3D map of a hybrid circuit.

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추천글

Testimonials

听听我们的客户要说的话

I am a longtime owner of Bruker profilers. My first one was a Dektak 6 stylus profilometer some twenty years ago, then a Dektak 150, followed by a ContourGT optical profiler, and most recently a Dektak XT. What’s more, all these machines are still working! They are just ‘work horses’, delivering fine and accurate measurements day-in and day-out, with minimal down-time. As the manager of a multi-user facility, I am really happy for all these years of good partnership with Bruker. Hundreds of students have already used those machines, thousands of times. Which fully proves these profilers are robust, reliable and friendly platforms.

Dr. Shimon Eliav, Unit for Nano Fabrication Head, The Hebrew University of Jerusalem

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