5nm生产光掩模维修
Bruker的AFM纳米机械系统是全球标准和首选生产技术,用于精确维修高级关键级别的光掩膜。NM-VI®系统是Bruker的第六代AFM引导的纳米机械。NM-VI将布鲁克(Bruker)与该公司脱颖而出,可以开发和交付与5纳米技术节点及以后的5纳米技术节点合作所需的创新纳米级材料成型过程。
纳米机械是半导体行业中一种独特的缺陷维修技术,结合了对AFM和专有纳米机械硬件和软件的位置控制,以在纳米水平上进行材料去除。
Its appeal lies in the precise and accurate removal of defects of various materials including chrome, MoSi, opaque MoSi, silicon nitride, quartz, EUV, foreign materials, and unknown particles. Its iterative repair capability and planar material removal guarantees repaired areas with a much wider “Through Focus” transmission window.
Bruker的AFM引导的纳米机器具有六代和近20年的内联经验,具有独特的优化和增强功能,可控制高端光掩膜的模式缺陷,随着特征大小和掩模复杂性的降低。值得注意的功能包括:
NM-VI提供的生产已被证明是纳米机械的,几乎没有缺点。基于AFM的纳米机械技术具有以下其他(聚焦离子束(FIB)和激光或电子束)掩模修复系统。
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Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.