SIRIUS-RF
Fourth generation system to provide industry standard reliability
SEMI standard compliance
Lo más destacado
Sirius-RF
The Sirius-RF is the fourth generation system in a mature platform to provide industry standard reliability, ease-of-use, fab automation, and SEMI standard compliance.
Convergent Beam
xrr
Offers fast, first-principle thickness and density measurements on scribe-lines
Dual Source
µXRF configuration
为每个设备提供灵活性和最佳性能
多堆
测量能力
Composition and thickness measurements on metrology pads or directly on-device in a non-destructive manner
Características
Sirius-RF功能
- 快速收敛束XRR,第一原则thickness and density measurements on scribe-lines
- Dual source µXRF configuration for flexibility and best performance for variety of layers per device
- 用于高级内存（DRAM，PCRAM，3D-NAND，MRAM），逻辑，电源设备和包装
- Composition and thickness measurement
- On metrology pads or directly on-device (non-destructive manner)
- 多堆栈测量能力
Aplicaciones
Application Example: PCRAM
- 内存元件（GESBTE -GST）和卵子阈值开关（OTS，GEASSE）的组成和厚度是关键参数
- Sirius-RFµXRF allows in-line composition monitoring on metrology pads or device areas
- Fast convergent beam XRR allows thickness measurement at 1-2 seconds per point.
Soporte
Support
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
我们训练有素的支持工程师，应用程序科学家和主题专家团队全力致力于通过系统服务和升级以及应用程序支持和培训来最大化您的生产率。betway手机客户端下载