SIRIUS-RF
提供行业标准可靠性的第四代系统
SEMI standard compliance
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Sirius-RF
The Sirius-RF is the fourth generation system in a mature platform to provide industry standard reliability, ease-of-use, fab automation, and SEMI standard compliance.
Convergent Beam
XRR
Offers fast, first-principle thickness and density measurements on scribe-lines
双源
µXRF配置
Delivers flexibility and best performance for a variety of layers per device
Multi-Stack
measurement capability
以非毁灭性方式直接对计量垫或直接在设备上的组成和厚度测量
特長
Sirius-RF功能
- Convergent beam XRR for fast, first-principle thickness and density measurements on scribe-lines
- 双源µXRF配置灵活性和最佳性能，适用于每个设备的各种层
- For advanced memory (DRAM, PCRAM, 3D-NAND, MRAM), Logic, power devices and packaging
- 组成和厚度测量
- On metrology pads or directly on-device (non-destructive manner)
- Multi-stack measurement capability
アプリケーション
Application Example: PCRAM
- Composition and thickness of the memory element (GeSbTe - GST) and Ovonic Threshold Switch (OTS, GeAsSe) are critical parameters
- Sirius-RF µXRF allows in-line composition monitoring on metrology pads or device areas
- Fast convergent beam XRR allows thickness measurement at 1-2 seconds per point.
サポート
支持
How Can We Help?
Bruker与我们的客户合作解决了现实世界中的应用程序问题。我们开发下一代技术，并帮助客户选择正确的系统和配件。在工具出售工具很久之后，这种合作伙伴关系继续通过培训和扩展服务。betway手机客户端下载
我们的训练有素的团队的支持工程师,达成ication scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.