SIRIUS-RF
Fourth generation system to provide industry standard reliability
SEMI standard compliance
Punti salienti
Sirius-RF
The Sirius-RF is the fourth generation system in a mature platform to provide industry standard reliability, ease-of-use, fab automation, and SEMI standard compliance.
Convergent Beam
XRR
Offers fast, first-principle thickness and density measurements on scribe-lines
Dual Source
µXRF configuration
Delivers flexibility and best performance for a variety of layers per device
Multi-Stack
measurement capability
Composition and thickness measurements on metrology pads or directly on-device in a non-destructive manner
Caratteristiche
Sirius-RF Features
- Convergent beam XRR for fast, first-principle thickness and density measurements on scribe-lines
- Dual source µXRF configuration for flexibility and best performance for variety of layers per device
- For advanced memory (DRAM, PCRAM, 3D-NAND, MRAM), Logic, power devices and packaging
- Composition and thickness measurement
- On metrology pads or directly on-device (non-destructive manner)
- Multi-stack measurement capability
Applicazioni
Application Example: PCRAM
- Composition and thickness of the memory element (GeSbTe - GST) and Ovonic Threshold Switch (OTS, GeAsSe) are critical parameters
- Sirius-RF µXRF allows in-line composition monitoring on metrology pads or device areas
- Fast convergent beam XRR allows thickness measurement at 1-2 seconds per point.
Supporto
Support
How Can We Help?
Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
我们的训练有素的团队的支持工程师,达成ication scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.