尺寸FastScan Pro |布鲁克 - 必威官网体育下载,betway手机客户端下载,betway捕鱼游戏下载

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Dimension FastScan Pro

尺寸FastScan Pro提供了当今可用的任何工业AFM的最高计量级速度和性能。必威东盟体育该系统可以实现自动化或半自动测量值，同时确保最大的使用易用性以及每次测量的最低成本，以进行质量控制，质量保证和故障分析。

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AFM生产技术

Enables industry-leading surface characterization.

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Lowers costs through operational efficiencies.

Automated

AFM scanner

提供可靠的无缝测量工作流程。

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Caractéristiques

Features

生产多功能性

FastScan Pro利用开放式平台，大或多样本持有人以及许多易用功能，为工业质量检查，QC和FA应用提供灵活的高性能纳米级计量学。必威东盟体育该系统可为半，数据存储和HB LED提供自动2英寸至12英寸的晶圆测量。它具有增加的XY样品旅行，可完全进入200毫米直径区域中的200mm晶片或多个样品，并提供300毫米晶片的可选Chucks。该系统还提供了针对地形，粗糙度和其他计量分析的高通量5-10X快速扫描仪的选择，或具有90µm扫描范围的图标扫描仪，用于较大的扫描和高性能地形性能。

强大的自动化软件

AutoMET™ full-recipe software delivers fast, automated metrology, simple operation, and AFM adaptability for easy capture of critical-to-quality measurements needed in production. This software allows automated measurements on multiple samples or a single large sample for nanoscale characterization across multiple locations. It also provides optical and AFM image pattern recognition, tip-centering, full wafer or grid mapping support, and image-placement accuracy within tens of nanometers. Comprehensive, yet simple, recipe writing gives real-time and offline use for the advanced users.

Easy measurement recipe creation allows engineers to define location by name, assign any type, and number measurements at each location.

食谱窗口显示基于晶圆的布局，以适用于晶圆内的精确，用户定义的X-Y测量位置。

精确的探针样本控制

The Dimension FastScan Pro provides the most precise probe-sample control permits widest range of sample types, from soft polymers, thin films and electrical samples to very hard materials.

独特的技术使您可以在样品上的任何原子上进行精确的力。这种精确的探针到样品控制允许样品类型的最广泛范围，从软聚合物，薄膜和电样品到硬材料。必威手机客户端它还提供了数百次参与和数据扫描的最低现象成像力和长期探测寿命。

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尺寸FastScan Pro数据库

Trenches are difficult to image with typical imaging modes due to excessive damping of the probe oscillation. ScanAsyst easily reaches the bottom of trenches. In this example, trenches with a depth of ~65 nm and a width of ~50 nm are routinely measured with standard Bruker probes.

使用尺寸AFM对24/7操作进行半自动操作，以表征3D几何以进行过程控制。

Extremely flat glass substrate with low roughness values of Rq=0.194nm, Ra=0.153nm.

An alkali-aluminosilicate sheet glass main property is characterized by its strength and scratch resistance, making it challenging to measure its nanometer topography consistently and reliably. Using FastScan AFM and a single Bruker HPI probe, a first image (A) rendered roughness Rq=0.99 nm, Ra=0.79. Image no. 615 (B) rendered the same roughness; Rq=0.99 nm, Ra=0.79. Insets are digitally zoomed images of scan no. 1 and no. 615 revealing insignificant topographical changes.

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