fp-III
45nm Production Photomask Repair
ハイライト
高速和精密面罩维修能力
The fp-III®是最新的除了Femto-Pulse激光系统布鲁克’s highly successful family of Photomask repair tools. With its extraordinary high-speed and precision mask repair capability, the fp-III is today’s most cost effective solution to replace obsolete, older, slower and less capable existing laser and FIB mask repair systems. The fp-III is designed for volume production mask repairs down to the 45nm technology node, including large and small area image reconstruction and through pellicle repairs.
特长
Ultimate Control of Mask Repair Made Easy
我们的Fempto-Pulse激光修复工艺可以通过形状，功率和脉冲数完全控制；独立于材料组成，材料接口或被去除的几何形状。
此外，集成的本地模式复制功能是系统上的标准配置，以便于设置和可重复的结果。
Designed for Best Performance
The fp-III comes standard with both reflected and transission imaging to provide the best possible AIMS transmission performance.
Offering superior through-pellicle repair and particle removal capability of persistent unknown particle contamination, even over large areas.
Lots of Capability with None of the Worries
布鲁克's mask repair fp-III delivers production-proven, high-speed repairs with:
- no vacuum requirement
- no chemistries
- no chemical residues
- no beam related charging effects
- 不需要使用不良定位标记进行恒定漂移校正
サポート
Support
How Can We Help?
布鲁克partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.