45nm Production Photomask Repair
FP-III®Femto-Pulse激光系统是布鲁克(Bruker)非常成功的照片修复工具系列的最新补充。FP-III凭借其非凡的高速和精密面罩维修能力,是当今最具成本效益的解决方案,可以替代过时,较旧,较慢且功能较低的现有激光和FIB蒙版维修系统。FP-III设计用于45nm技术节点的体积生产面膜修理,包括大小区域图像重建以及通过颗粒修复。
Our Fempto-Pulse laser repair processes are fully controllable by shape, power, and number of pulses; independent of material composition, material interfaces or the geometry being removed.
Additionally, the integrated local pattern copy functions are standard on the system for easy setup and repeatable results.
FP-IIIcomes standard with both reflected and transission imaging to provide the best possible AIMS transmission performance.
Offering superior through-pellicle repair and particle removal capability of persistent unknown particle contamination, even over large areas.
Bruker's mask repair fp-III delivers production-proven, high-speed repairs with:
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Bruker与我们的客户合作解决了现实世界中的应用程序问题。我们开发下一代技术,并帮助客户选择正确的系统和配件。在工具出售工具很久之后,这种合作伙伴关系继续通过培训和扩展服务。betway手机客户端下载
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.