FP-III
45nm Production Photomask Repair
하이라이트
High-Speed and Precision Mask Repair Capability
FP-III®是最新的除了Femto-Pulse激光系统Bruker’s highly successful family of Photomask repair tools. With its extraordinary high-speed and precision mask repair capability, the fp-III is today’s most cost effective solution to replace obsolete, older, slower and less capable existing laser and FIB mask repair systems. The fp-III is designed for volume production mask repairs down to the 45nm technology node, including large and small area image reconstruction and through pellicle repairs.
특징
面罩维修的最终控制变得容易
Our Fempto-Pulse laser repair processes are fully controllable by shape, power, and number of pulses; independent of material composition, material interfaces or the geometry being removed.
Additionally, the integrated local pattern copy functions are standard on the system for easy setup and repeatable results.
Designed for Best Performance
FP-IIIcomes standard with both reflected and transission imaging to provide the best possible AIMS transmission performance.
Offering superior through-pellicle repair and particle removal capability of persistent unknown particle contamination, even over large areas.
Lots of Capability with None of the Worries
Bruker's mask repair fp-III delivers production-proven, high-speed repairs with:
- 没有真空要求
- no chemistries
- 没有化学残留物
- no beam related charging effects
- no need for constant drift correction using undesirable positioning markers
지원
支持
How Can We Help?
Bruker与我们的客户合作解决了现实世界中的应用程序问题。我们开发下一代技术，并帮助客户选择正确的系统和配件。在工具出售工具很久之后，这种合作伙伴关系继续通过培训和扩展服务。betway手机客户端下载
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.