45nm Production Photomask Repair
The fp-III®Femto-Pulse激光系统是布鲁克(Bruker)非常成功的照片修复工具系列的最新补充。FP-III凭借其非凡的高速和精密面罩维修能力,是当今最具成本效益的解决方案,可以替代过时,较旧,较慢且功能较低的现有激光和FIB蒙版维修系统。FP-III设计用于45nm技术节点的体积生产面膜修理,包括大小区域图像重建以及通过颗粒修复。
我们的Fempto-Pulse激光修复工艺可以通过形状,功率和脉冲数完全控制;独立于材料组成,材料接口或被去除的几何形状。
此外,集成的本地模式复制功能是系统上的标准配置,以便于设置和可重复的结果。
The fp-III comes standard with both reflected and transission imaging to provide the best possible AIMS transmission performance.
提供superior through-pellicle repair and particle removal capability of persistent unknown particle contamination, even over large areas.
布鲁克's mask repair fp-III delivers production-proven, high-speed repairs with:
How Can We Help?
布鲁克partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.
我们训练有素的支持工程师,应用程序科学家和主题专家团队全力致力于通过系统服务和升级以及应用程序支持和培训来最大化您的生产率。betway手机客户端下载