Datacube模式扩展了功能,例如Peakforce Tuna和Peakforce KPFM, by enabling the acquisition of multidimensional data cubes. For materials scientists and engineers, this breaks long-standing efficiency and characterization barriers. These new capabilities provide simultaneous capture of nanometer-scale electrical and mechanical characteristics in high-density data cubes, previously impossible to attain in a single measurement.
Datacube模式使用FastForce量要在每个像素中执行力距离频谱,并具有用户定义的“停留时间”。使用高数据捕获率,在停留时间内进行了多种电测量,导致每个像素的电气和机械光谱。典型的力距离光谱以40 Hz的坡道速率测量,每个像素为100 ms的停留时间,在单个实验中提供了充分的表征,该实验在商业AFM中是闻所未闻的。同时渲染地形,机械和多维电气信息不再是一个史诗般的实验。现在,可以作为常规的AFM测量来实现此类数据。DataCube模式在每次扫描中都具有复合数据的纳米长度尺度上的多维数据立方体。该功能可以实现一系列强大的新模式。
导电AFM结果应用的影响ed sample voltage, depicting important performance transitions of a material or device. DCUBE-TUNA enables simultaneous acquisition of nanomechanical information and electrical conductivity at a multitude of sample voltages in a single measurement, building a dense data cube of sample information. This is the only mode providing a complete picture of the sample conductivity, with details such as conductivity type (Ohmic, non-Ohmic, Schottky, etc.), and barrier heights.
扫描电容显微镜(SCM)provides a method for direct measurement of active carrier concentration with nanometer-scale accuracy. DCUBE-SCM enables simultaneous acquisition of nanomechanical and carrier information at a multitude of sample voltages in a single measurement. The technique provides a unique solution to observe dC/dV amplitude and dC/dV phase value changes and junction position shifts. Through the resulting data cubes, a researcher can observe additional information on oxide thickness, oxide charges, threshold voltages, contamination from mobile ions, and interface trap density.
压电响应(压电)显微镜(PFM)是一种以纳米尺度对样品的反向压电效应映射的技术。DCUBE-PFM可以同时获取数据立方体中纳米力学信息和PFM振幅/相光谱,这揭示了单个数据集中每个单个域的开关电压。此外,DCUBE-PFM克服了与常规的数据分析的伪像,样本损坏和数据分析的复杂性联系模式approaches.
DCUBE PIEZORESPONSE(PIYZOFORCE)显微镜与接触谐振相结合提供了DCUBE-PFM的好处,并在每个像素上提供频率坡道的额外好处,从而提供了全光谱,并提供了触点共振的峰值灵敏度。
扫描扩散电阻显微镜(SSRM)is used to map the variation in majority carrier concentration in doped semiconductors. DCUBE-SSRM enables simultaneous acquisition of nanomechanical information and 3D carrier density mapping in a single measurement. The resulting data cubes provide complete characterization including nanoscale topography, mechanical information and log-resistance spectroscopy. In addition, I-V measurements reveal conductivity whether Ohmic, non-Ohmic, Schottky, or other.
在用户定义的样品电压下,扫描微波显微镜成像(SMIM)提供了阻抗的电容(C)和电阻(R)部分的地图,以及DC/DV和DR/DV数据。使用dcube -smim,可以在单个扫描中以各种样品电压获取相同的属性 - 并立即获得“完整图片”。这些光谱还揭示了其他信息,例如传导类型(欧姆,非荷兰,Schottky等),氧化物厚度,氧化物电荷,移动离子的污染和界面陷阱密度。