Rhazer-III
Production Photomask Haze Mitigation and Removal
najważniejszeInformacje
Rhazer III
The Bruker Rhazer-III®system is specially designed for the wafer fab to provide an in-fab haze removal and management capability. Rhazer technology is清洁anddry.
Cechy Charakterystyczne
Photo-Induced Defect Management (Haze Mitigation)
Photo-induced micro-contamination on photomasks (haze) has become an increasingly pervasive and costly problem throughout the semiconductor industry. Recent wet clean and environmental control techniques have helped to slow haze formation during wafer stepper exposures, but show no promise of a haze prevention solution. The Bruker Rhazer-III®system is specially designed for the wafer fab to provide an in-fab haze removal and management capability. Rhazer technology is clean and dry. Processing the mask does not require removal of the pellicle and causes no damage to the mask absorber materials and no changes to phase, transmission or CDs, meaning reticles can be cleaned as often as needed without leaving the control of the fab line.
关键性能特征
提高光刻线的效率：
- 干燥过程 - 无颗粒去除
- Fast turnaround - full reticle clean
- Full control - retcles never leave the wafer fab
- Fewer cleans - no haze formation in storage
Fully Automated Operation:
- SMIF和高架轨道兼容；RFID/OCR/条形码读取器
- SEC/GEM兼容
- Robotic handling including mask flipper
- Easy to operate; highly user friendly GUI
Extends Mask Lifetime:
- No absorber damage
- No CD, phase or transmission variance
- No added chemical residues
- No limit to number of cleans
Wafer Fab Cost Savings:
- Less wasted scanner downtime waiting for masks
- Very low cost mask cleans
- 需要更少的重复口罩
- Extended interval between defect inspections
- 减少了与雾相关的晶圆损失
“绿色”技术：
- No acids, solvents or de-ionized water
- No harmful effluents or waste management
- Low energy consumption (7kW @ 208V AC)
- Small system footprint (1.24m x 2.31m)
Results
WSPARCIE
支持
How Can We Help?
Bruker与我们的客户合作解决了现实世界中的应用程序问题。我们开发下一代技术，并帮助客户选择正确的系统和配件。在工具出售工具很久之后，这种合作伙伴关系继续通过培训和扩展服务。betway手机客户端下载
Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.