CONTOURGT-X
Highlights
CONTOURGT-X
Contourgt-X 3D光学剖面仪为实验室研究和生产过程控制提供了最高的性能非接触表面测量。该计量系统结合了十代白光干涉法（WLI）创新和设计，在该行业最大的视野中提供了最高的垂直分辨率。关键功能包括完整的自动化和生产界面，大型电动XYZ阶段，头部倾斜/倾斜以及整体空气隔离台。Contourgt-X从头开始设计，最苛刻的研发，质量保证以及过程质量控制需求，提供了具有GAGE能力的3D光学精度和鲁棒性的终极。
Eigenschaften
准备生产的设计和可靠性
Contourgt-X结合了Bruker的专利尖端/倾斜头，获得专利的自校准激光参考，集成模式识别以及许多其他专有的干涉率创新，以提供具有高通量的极其准确的表面计量学。The system’s automation-ready configuration enables rapid optimization in almost any production environment with features ranging from an air table stabilizer kit for enhanced X, Y, Z wafer placement accuracy and PDU, EMO, and vacuum systems for integration to modified vacuum chucks for autoloader end-effector compatibility.
High-Accuracy Stage for Highest Resolution Imaging
The ContourGT-X motorized XY stage provides 12-inch encoded movement in the X and Y directions. The stage supports automated routines, such as multiple-point data collection, as well as stitching capability for large-area analyses. The 0.5 micron encoders provide reliable, repeatable automation and sample positioning. Sample positioning is made easy for operators by intuitive joystick and software interface controls.
Intuitive Surface Measurement and Analysis Software
布鲁克's Vision64® Operation and Analysis Software provides the industry’s most functional and streamlined graphical user interface, combining intelligent architecture with intuitive visual workflow and extensive user-defined automation capabilities for fast and comprehensive data collection and analysis. An Advanced Production Interface allows adaptation of ContourGT-X to almost any production environment and automated process. The interface provides tools to customize process workflow, automate mapping, and load measurement recipes.
