CONTOURGT-X
Punti Salienti
CONTOURGT-X
The ContourGT-X 3D Optical Profiler provides the highest performing non-contact surface measurements for laboratory research and production process control. Incorporating ten generations of white light interferometry (WLI) innovation and design, this metrology system delivers the highest vertical resolution over the industry’s largest field of view. Key features include full automation and a production interface, a large motorized XYZ stage, tip/tilt in the head, and an integral air isolation table. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, the ContourGT-X offers the ultimate in gage-capable 3D optical accuracy and robustness.
Caratteristiche
准备生产的设计和可靠性
Contourgt-X结合了Bruker的专利尖端/倾斜头，获得专利的自校准激光参考，集成模式识别以及许多其他专有的干涉率创新，以提供具有高通量的极其准确的表面计量学。The system’s automation-ready configuration enables rapid optimization in almost any production environment with features ranging from an air table stabilizer kit for enhanced X, Y, Z wafer placement accuracy and PDU, EMO, and vacuum systems for integration to modified vacuum chucks for autoloader end-effector compatibility.
High-Accuracy Stage for Highest Resolution Imaging
Contourgt-X电动XY阶段在X和Y方向上提供了12英寸编码的运动。该阶段支持自动例程，例如多点数据收集，以及用于大区域分析的缝合能力。0.5微米编码器提供可靠的，可重复的自动化和样品定位。通过直观的操纵杆和软件接口控件使操作员易于使用样品定位。
Intuitive Surface Measurement and Analysis Software
布鲁克's Vision64® Operation and Analysis Software provides the industry’s most functional and streamlined graphical user interface, combining intelligent architecture with intuitive visual workflow and extensive user-defined automation capabilities for fast and comprehensive data collection and analysis. An Advanced Production Interface allows adaptation of ContourGT-X to almost any production environment and automated process. The interface provides tools to customize process workflow, automate mapping, and load measurement recipes.
