ContourGT-X
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ContourGT-X
The ContourGT-X 3D Optical Profiler provides the highest performing non-contact surface measurements for laboratory research and production process control. Incorporating ten generations of white light interferometry (WLI) innovation and design, this metrology system delivers the highest vertical resolution over the industry’s largest field of view. Key features include full automation and a production interface, a large motorized XYZ stage, tip/tilt in the head, and an integral air isolation table. Designed from the ground up for the most demanding R&D, quality assurance, and process quality control needs, the ContourGT-X offers the ultimate in gage-capable 3D optical accuracy and robustness.
Особенности
准备生产的设计和可靠性
Contourgt-X结合了Bruker的专利尖端/倾斜头，获得专利的自校准激光参考，集成模式识别以及许多其他专有的干涉率创新，以提供具有高通量的极其准确的表面计量学。The system’s automation-ready configuration enables rapid optimization in almost any production environment with features ranging from an air table stabilizer kit for enhanced X, Y, Z wafer placement accuracy and PDU, EMO, and vacuum systems for integration to modified vacuum chucks for autoloader end-effector compatibility.
最高分辨率成像的高准确阶段
The ContourGT-X motorized XY stage provides 12-inch encoded movement in the X and Y directions. The stage supports automated routines, such as multiple-point data collection, as well as stitching capability for large-area analyses. The 0.5 micron encoders provide reliable, repeatable automation and sample positioning. Sample positioning is made easy for operators by intuitive joystick and software interface controls.
直观的表面测量和分析软件
Bruker的Vision64®操作和分析软件提供了行业功能最强和简化的图形用户界面，将智能体系结构与直观的视觉工作流以及广泛的用户定义的自动化功能相结合，以快速，全面的数据收集和分析。先进的生产接口允许将Contourgt-X适应几乎任何生产环境和自动化过程。该界面提供了自定义过程工作流程，自动映射和加载测量配方的工具。
