X-Ray Metrology for Compound Semiconductors

QC3

High-resolution X-ray diffraction system for epilayers

Long-established and well-proven QC system for epilayers

VC QC3

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QC3

The QC3 is the long-established and well-proven QC system for epilayers. It is a high-resolution X-ray diffraction tool that is ideal for quality control. It is used for the measurement of composition and thickness in epitaxial layers of almost any material. The system uses standard sealed tube optics, combined with a variety of beam conditioning crystals that can be optimized to give the highest combination of resolution and intensity for each application.

Full 300mm of travel
允许同时测量大晶片或几个小晶片

Особенности

Features

自动操作

The QC3 offers true automated operation, with straight-forward horizontal sample mounting, and fully automated alignment, measurements, and data analysis. Data analysis can be performed automatically, or offline using our popular RADS software. The sample stage has a full 300mm of travel, allowing for measurements of large wafers, or several smaller wafers simultaneously. It is the traditional tool of choice for QC measurements within epilayer growth.

Поддержка

Support

我们能帮你什么吗?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

我们训练有素的支持工程师,应用程序科学家和主题专家团队全力致力于通过系统服务和升级以及应用程序支持和培训来最大化您的生产率。betway手机客户端下载

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