FTIR spectroscopycan be used for the layer thickness-确定这样的films.For smaller structures in the米icrometer range, FTIR microscopes provide excellentresults and enable reliable layer thickness determinations.
This is done, by using reflection measurements on the optically transparend diamond. This leads toso-called interference-induced fringes. These arecaused by light being reflected both from the surface of thecoating layer and from the substrate below the coating.
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To make it short,Raman spectroscopyis one of the most powerful toolsfor carbon allotrope analyses.Naturally, it is the go-to-tool for chemical vapor deposited diamond-like carbon.
It allows differentiating thenumerous carbon types and provides essential structuralinformation, e.g. the important sp2/sp3ratio. Furthermore,Raman microscopy is able to acquire Raman spectra in thesubmicrometer range.
Metal coatings are essential to many industrial sectors by providing enhanced surface properties to a wide variety of products. The metal coatings can provide a durable, corrosion-resistant layer to protect the base material, and help to minimize the wear and tear of metallic products. Metallic coatings can improve electrical conductivity, resistance to torque, solderability among other things. The quality control of composition and thickness of coatings is critical to ensure the correct coating properties and durability.
When tight quality control of metal coatings is required, X-ray fluorescence (XRF) analysis is the best overall solution. The BrukerM1 MISTRAL米icro-XRF instrument can provide simultaneous coating thickness and coating composition measurements. In addition to coating analysis, theM1 MISTRALcan also measure the chemical composition of metal alloys, plating bath liquids, plastics and many other materials.
As X-rays may pass through matter, XRF in general allows for the determination of layer thicknesses. Using米icro-XRF, in this case theM4 TORNADO, the layer analysis (thickness and composition) is rendered feasible with spatial resolutions on the micrometer scale. Layer analysis is strongly based on atomic fundamental parameter quantification and can be improved by use of standard samples. Thus "common" layer systems, such as ENEPIG coatings, ZnNi coatings, or solder layers, where standards are readily available can be measured with high accuracy but also novel layer systems in an R&D environment can be tested.
The analysis of thin layers or coatings is a common task in米icro-XRF spectrometry.Both the non-destructive operation of the method and the ability of X-rays to penetrate into sample and obtain information on the material beneath the surface make this method attractive for the purpose of analyzing single or multiple layers.
The special challenge in analyzing the samples discussed here is that both layer (aluminum) and substrate (silicon) are light elements, which requires measurement under vacuum, otherwise the air in the beam path between sample and detector would absorb the low energy radiation emitted by the sample. Additionally, this application compares manual and automatic analysis using Auto-Point. Results show that layer thickness can be accurately determined with米icro-XRF(M4 TORNADO) , which is confirmed by comparison with direct measurement results on a layer fracture edge in the scanning electron microscope.
Most machining steps introduce residual stresses which can affect the performance of manufactured components. Compressive stress can be engineered into a metal coating to resist crack propagation, while tensile stress can be exploited to enhance conductivity in semiconductors. Strained materials exhibit changes in atomic spacing which can be detected by X-ray diffraction (XRD) and related to the stress via elastic constants.